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A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications by Linh Mai; Jae‐young Lee; Van‐Su Pham; Giwan Yoon is a Engineering article available to read on EtoBox.

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## Abstract In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin‐film Cr adhesion layers between W and SiO~2~ film layers in the Bragg reflectors, particularly to enhance the adhesion in‐between. As a result, the resonances were found to occur at 2.7–3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q‐factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. © 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 50: 375–378, 2008; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.23088

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Author

Linh Mai; Jae‐young Lee; Van‐Su Pham; Giwan Yoon

Publisher

John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley (ISSN 0895-2477)

Published

2007

Language

EN

Field

Engineering (Physical Sciences)