About this document
A Mini Course On The Principles of Plasma Discharges by rgdarnley is a document available to read on EtoBox.
This mini-course on plasma discharges, presented by Michael A. Lieberman at UC Berkeley, covers the fundamentals of plasma and discharge behavior, including their applications in microelectronics such as etching and deposition. The course outlines key concepts such as non-equilibrium properties, energy loss processes, and the modeling of plasma reactors. It aims to provide a comprehensive understanding of plasma processing techniques and their significance in advancing microelectronics technology.
- Author
- rgdarnley
- Language
- EN