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Can I read Response of superconducting characteristics of Hg-based high-Tc thin films to photolithographic processes on EtoBox?
Response of superconducting characteristics of Hg-based high-Tc thin films to photolithographic processes by T Aytug; Y Yu; S.L Yan; Y.Y Xie; J.Z Wu is a Physics and Astronomy article available to read on EtoBox.
What is Response of superconducting characteristics of Hg-based high-Tc thin films to photolithographic processes about?
The stability of the properties of Hg-based superconducting thin films has been studied during conventional photolithographic patterning processes. The patterning process was divided into individual steps such as photoresist baking, developing and etching in order to observe the effect of each step separately on the superconducting properties of the samples. After baking of the photoresist, a considerable degradation in the superconducting properties was observed, while samples did not show any visible degradation after they were etched with acid solution.
Who reads Response of superconducting characteristics of Hg-based high-Tc thin films to photolithographic processes?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- T Aytug; Y Yu; S.L Yan; Y.Y Xie; J.Z Wu
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0921-4534)
- Published
- 1999
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)