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About this Engineering article
Characterization of Low-Dielectric Constant Silicon Carbonitride (SiCN) Dielectric Films for Charge Trapping Nonvolatile Memories by Ahmed, S. R. A.; Naito, S.; Kobayashi, K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ahmed, S. R. A.; Naito, S.; Kobayashi, K.
- Publisher
- The Electrochemical Society; Electrochemical Society, Inc. (ISSN 1938-6737)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)
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