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About this Engineering article
Closed Loop Control of Thin Film Sputter Deposition Processes Using Glow Discharge Mass Spectroscopy by Tisone, T. C. ;Bolker, B. F. T. ;Latos, T. S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Tisone, T. C. ;Bolker, B. F. T. ;Latos, T. S.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0022-5355)
- Published
- 1980
- Field
- Engineering (Physical Sciences)
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