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About this Physics and Astronomy article
Hydrogenated crystalline silicon fabricated at low-substrate temperatures by reactive sputtering in He-H2 atmosphere by T. Imura; K. Mogi; A. Hiraki; S. Nakashima; A. Mitsuishi is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- T. Imura; K. Mogi; A. Hiraki; S. Nakashima; A. Mitsuishi
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0038-1098)
- Published
- 1981
- Field
- Physics and Astronomy (Physical Sciences)
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