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Laser-induced Changes of Silicon Carbon Films Studied by Vibrational Spectroscopy by H. Hobert; H.H. Dunken; S. Urban; F. Falk; H. Stafast is a Chemistry article available to read on EtoBox.

What is Laser-induced Changes of Silicon Carbon Films Studied by Vibrational Spectroscopy about?

Mixtures of silicon and carbon deposited on glass at low temperatures form thin ®lms of an amorphous but reactive material. Such layers have been modi®ed by laser beams and investigated by IR and Raman spectroscopy. KrF laser pulses form nanocrystalline SiC. Continuous Ar or frequency doubled Nd:YAG laser irradiation of thick ®lms produce microcrystalline silicon carbide beside of microcrystalline silicon and graphite and causes a redistribution of material. By optical modelling of the IR spectra the dielectric functions of the amorphous ®lms and of the modi®ed material were determined. Raman spectra show C±C, C±Si, and Si±Si valence bond vibrations and give information about the chemical composition and crystalline structure of the ®lms.

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Author

H. Hobert; H.H. Dunken; S. Urban; F. Falk; H. Stafast

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-2031)

Published

2002

Language

EN

Field

Chemistry (Physical Sciences)