About this Materials Science article
Properties of silicon nanoparticles embedded in SiNxdeposited by microwave-PECVD by Delachat, F; Carrada, M; Ferblantier, G; Grob, J-J; Slaoui, A is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Delachat, F; Carrada, M; Ferblantier, G; Grob, J-J; Slaoui, A
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing (ISSN 0957-4484)
- Published
- 2009
- Field
- Materials Science (Physical Sciences)