About this Engineering article
Smart-cut layer transfer of single-crystal SiC using spin-on-glass by J. Lee; I. Bargatin; J. Park; K. M. Milaninia; L. S. Theogarajan; R. Sinclair; R. T. Howe is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Lee; I. Bargatin; J. Park; K. M. Milaninia; L. S. Theogarajan; R. Sinclair; R. T. Howe
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics; AVS Science and Technology Society (ISSN 1520-8567)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)