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Can I read Fabrication of Nanofigures by Focused Electron Beam-induced Deposition on EtoBox?
Fabrication of Nanofigures by Focused Electron Beam-induced Deposition by Kazuyuki Ueda; Masamichi Yoshimura is a Engineering article available to read on EtoBox.
What is Fabrication of Nanofigures by Focused Electron Beam-induced Deposition about?
Contamination lithography has been performed on various metal substrates by focused electron beam-induced deposition (EBID) technique in a field emission scanning electron microscope (FE-SEM). We used pump oil (hydrocarbon) as precursors for EBID. It was found that the growth rate was independent of primary electron energy (500 to 30 keV) but was varied with elements ranging from 0.34 to 2.97 A/ min. Energy dispersive X-ray (EDX) spectroscopy measurement revealed that the grown nanowire contains a substrate element. A complicated mesh patterns with nanofigures was successfully fabricated manually with optimal growth conditions.
Who reads Fabrication of Nanofigures by Focused Electron Beam-induced Deposition?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kazuyuki Ueda; Masamichi Yoshimura
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 2004
- Language
- EN
- Field
- Engineering (Physical Sciences)