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About this Engineering article
Dynamic Finite Element Analysis of Failure in Alternating Phase-Shift Masks Caused by Megasonic Cleaning by Yin, X.; Komvopoulos, K. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yin, X.; Komvopoulos, K.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1521-3331)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)