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About this Engineering article
Simultaneous Capacitive and Electrothermal Position Sensing in a Micromachined Nanopositioner by Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zhu, Y.; Moheimani, S. O. R.; Yuce, M. R.
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 0741-3106)
- Published
- 2011
- Field
- Engineering (Physical Sciences)
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