About this scholarly article

IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Fabrication of 3D trench PZT capacitors for 256Mbit FRAM device application by June-Mo Koo, ; Bum-Seok Seo, ; Sukpil Kim, ; Sangmin Shin, ; Jung-Hyun Lee, ; Hionsuck Baik, ; JangHo Lee, ; Jun Ho Lee, ; Byoung-Jae Bae, ; Ji-Eun Lim, ; Dong-Chul Yoo, ; Soon-Oh Park, ; Hee-Suk Kim, ; Hee Han, ; Sunggi Baik, ; Jae-Young Choi, ; Yong Jun Park, ; Youngsoo Park, is a scholarly article available to read on EtoBox.

Author

June-Mo Koo, ; Bum-Seok Seo, ; Sukpil Kim, ; Sangmin Shin, ; Jung-Hyun Lee, ; Hionsuck Baik, ; JangHo Lee, ; Jun Ho Lee, ; Byoung-Jae Bae, ; Ji-Eun Lim, ; Dong-Chul Yoo, ; Soon-Oh Park, ; Hee-Suk Kim, ; Hee Han, ; Sunggi Baik, ; Jae-Young Choi, ; Yong Jun Park, ; Youngsoo Park,

Publisher

IEEE

Published

2005

Language

EN