About this scholarly article

2016 IEEE International Conference on Plasma Science (ICOPS) - Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4 by Berger, Birk; Brandt, Steven; Franek, James; Schuengel, Edmund; Koepke, Mark; Schulze, Julian; Mussenbrock, Thomas; Bruneau, Bastien; Johnson, Erik; Lafleur, Trevor; Booth, Jean-Paul; O'Connell, Deborah; Gans, Timo; Korolov, Ihor; Derzsi, Aranka; Donko, Zoltan is a scholarly article available to read on EtoBox.

Author

Berger, Birk; Brandt, Steven; Franek, James; Schuengel, Edmund; Koepke, Mark; Schulze, Julian; Mussenbrock, Thomas; Bruneau, Bastien; Johnson, Erik; Lafleur, Trevor; Booth, Jean-Paul; O'Connell, Deborah; Gans, Timo; Korolov, Ihor; Derzsi, Aranka; Donko, Zoltan

Publisher

IEEE

Published

2016

Language

EN