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Can I read Magnetron Sputtering Cathode with Confined Magnetic Flux on EtoBox?
Magnetron Sputtering Cathode with Confined Magnetic Flux by Ryuta Ai; Kiyotaka Wasa; Yoko Ichikawa is a Engineering article available to read on EtoBox.
What is Magnetron Sputtering Cathode with Confined Magnetic Flux about?
In a planar magnetron cathode, a disk target shows an erosion ring at the central region of the target. It was found that the grounded permalloy sheet which covered the outer surface of the magnetron cathode con"ned the magnetic leakage #ux and enhanced the transverse magnetic "eld at the outer region of the target. The additional erosion ring was observed at the outer region. The total amount of the sputtered substance increased by 4 times. The grounded permalloy sheet will provide a compact magnetron cathode with a controlled erosion pattern.
Who reads Magnetron Sputtering Cathode with Confined Magnetic Flux?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Ryuta Ai; Kiyotaka Wasa; Yoko Ichikawa
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)