About this book

Metrology, inspection, and process control for microlithography XVI : 4-7 March, 2002, Santa Clara, [California] USA by Daniel J.C. Herr, chair/editor; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International; International SEMATECH is a book available to read on EtoBox.

Author

Daniel J.C. Herr, chair/editor; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International; International SEMATECH

Publisher

Society Of Photo Optical

Published

2002

Language

EN

ISBN

9780819444356

Subjects

Engineering, Stem