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The document summarizes an experiment on optical spectroscopy of pulsed plasma used for titanium nitride coatings production. A pulsed discharge was created between electrodes in a vacuum chamber using a RLC circuit. Optical emission spectroscopy was performed on the plasma using a diffraction grating spectrograph. Spectral lines corresponding to ionized titanium and nitrogen species were observed. The intensities of spectral lines for species like Ti+, Ti++, and N2+ were found to increase with pressure, wh

Author

Le Huy

Language

EN