About this document
Machine Learning Based Edge Placement Error Analysis and Optimization A Systematic Review by jianyinglinghu is a document available to read on EtoBox.
The document presents a systematic review of machine learning techniques applied to edge placement error (EPE) analysis and optimization in semiconductor manufacturing. It highlights the importance of reducing EPE for the functionality of integrated circuits, discusses various machine learning applications for overlay metrology, and evaluates existing research on mask optimization methods. The review also outlines the methodology used for literature selection and categorizes the findings into relevant theme
- Author
- jianyinglinghu
- Language
- EN