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About this Engineering article
Defect accumulation during ion irradiation of crystalline Si probed by in situ conductivity measurements by Battaglia, A.; Coffa, S.; Priolo, F.; Spinella, C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Battaglia, A.; Coffa, S.; Priolo, F.; Spinella, C.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1994
- Language
- EN
- Field
- Engineering (Physical Sciences)