About this scholarly article

International Electron Devices Meeting. IEDM Technical Digest - Suppressed short-channel effects and improved stability in polysilicon thin film transistors with very thin ECR N/sub 2/O-plasma gate oxide by Jin-Woo Lee, ; Nae-In Lee, ; Sung-Hoi Hur, ; Chul-Hi Han, is a scholarly article available to read on EtoBox.

Author

Jin-Woo Lee, ; Nae-In Lee, ; Sung-Hoi Hur, ; Chul-Hi Han,

Publisher

IEEE

Published

1997