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About this Engineering article
Comparison of Dry Development Techniques using O2 and SO2/O2 Low-Pressure Plasmas by M. Pons; O. Joubert; C. Martinet; J. Pelletier; J. Panabière; A. Weill is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- M. Pons; O. Joubert; C. Martinet; J. Pelletier; J. Panabière; A. Weill
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1994
- Field
- Engineering (Physical Sciences)
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