CVD OF SILICON NITRIDE PLATE FROM HSiCI 3 ‐NH 3 ‐H 2 MIXTURES

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Cvd of Silicon Nitride Plate From Hsici 3 ‐nh 3 ‐h 2 Mixtures

English1993

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Published by Taylor and Francis Group; Informa UK (Taylor & Francis); Marcel Dekker Inc.; Informa UK Limited (ISSN 1042-6914) (1993).

Publisher: Taylor and Francis Group; Informa UK (Taylor & Francis); Marcel Dekker Inc.; Informa UK Limited (ISSN 1042-6914)

About this Engineering article

CVD OF SILICON NITRIDE PLATE FROM HSiCI 3 ‐NH 3 ‐H 2 MIXTURES by Lennartz, J.W.; Dowell, M.B. is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author

Lennartz, J.W.; Dowell, M.B.

Publisher

Taylor and Francis Group; Informa UK (Taylor & Francis); Marcel Dekker Inc.; Informa UK Limited (ISSN 1042-6914)

Published

1993

Language

Field

Engineering (Physical Sciences)