Skip to content

Opening book details…

About this Engineering article

Fabrication of TiSi2 Using Microwave Hydrogen Plasma Annealing by Tao Wang; Hi-Deok Lee; Y. B. Dai is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Tao Wang; Hi-Deok Lee; Y. B. Dai
Publisher
Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 1059-9495)
Published
2005
Field
Engineering (Physical Sciences)

More by Tao Wang; Hi-Deok Lee; Y. B. Dai

Browse all works by Tao Wang; Hi-Deok Lee; Y. B. Dai