About this scholarly article

2018 IEEE International Electron Devices Meeting (IEDM) - Very Large Scale Integration Optomechanics: a cure for loneliness of NEMS resonators? by Hermouet, Maxime; Sansa, Marc; Defoort, Martial; Banniard, Louise; Dominauez-Medina, Sergio; Fostner, Shawn; Palanchoke, Ujwol; Fafin, Alexandre; Gely, Marc; Hutin, Louis; Plantier, Christophe; Rolland, Emmanuel; Tabone, Claude; Usai, Giulia; Ernst, Thomas; Villard, Patrick; Billiot, Gerard; Mattei, Paul; Nonglaton, Guillaume; Fontelaye, Caroline; Barrois, Charlie; Castany, Olivier; Santos, Eduardo Gil; Allain, Pierre E.; Vernhes, Emeline; Boulanger, Pascale; Brenac, Ariel; Masselon, Christophe; Favero, Ivan; Alava, Thomas; Jourdan, Guillaume; Hentz, Sebastien is a scholarly article available to read on EtoBox.

Author

Hermouet, Maxime; Sansa, Marc; Defoort, Martial; Banniard, Louise; Dominauez-Medina, Sergio; Fostner, Shawn; Palanchoke, Ujwol; Fafin, Alexandre; Gely, Marc; Hutin, Louis; Plantier, Christophe; Rolland, Emmanuel; Tabone, Claude; Usai, Giulia; Ernst, Thomas; Villard, Patrick; Billiot, Gerard; Mattei, Paul; Nonglaton, Guillaume; Fontelaye, Caroline; Barrois, Charlie; Castany, Olivier; Santos, Eduardo Gil; Allain, Pierre E.; Vernhes, Emeline; Boulanger, Pascale; Brenac, Ariel; Masselon, Christophe; Favero, Ivan; Alava, Thomas; Jourdan, Guillaume; Hentz, Sebastien

Publisher

IEEE

Published

2018