About this scholarly article

IECON 2013 - 39th Annual Conference of the IEEE Industrial Electronics Society - An acoustic set up for the vibration analysis of silicon wafers by Mitterhofer, S.; Puhringer, J. D.; Schlosser, V. is a scholarly article available to read on EtoBox.

Author

Mitterhofer, S.; Puhringer, J. D.; Schlosser, V.

Publisher

IEEE

Published

2013