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About this Engineering article
Characterization of UHV E-beam Evaporated Low-Stress Thick Silicon Film for MEMS Application by Michael, A.; Kazuo, O.; Xu, Y.W.; Kwok, C.Y.; Puzzer, T.; Varlamov, S. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Michael, A.; Kazuo, O.; Xu, Y.W.; Kwok, C.Y.; Puzzer, T.; Varlamov, S.
- Publisher
- Elsevier ; [Oxford]: Elsevier Ltd.; Elsevier BV (ISSN 1877-7058)
- Published
- 2012
- Field
- Engineering (Physical Sciences)
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