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About this Physics and Astronomy article
Tantalum nitride as a diffusion barrier between Pd2Si or CoSi2 and aluminum by M. A. Farooq; S. P. Murarka; C. C. Chang; F. A. Baiocchi is a Physics and Astronomy article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- M. A. Farooq; S. P. Murarka; C. C. Chang; F. A. Baiocchi
- Publisher
- American Institute of Physics; AIP Publishing; Publons (ISSN 0021-8979)
- Published
- 1989
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)
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