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About this Engineering article
Integrated circuit manufacturing—circa 1977 : R. M. Burger and R. P. Donovan, Solid St. Technol., October (1969), p. 58 is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0026-2714)
- Published
- 1970
- Field
- Engineering (Physical Sciences)