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The document presents a high-speed piezoelectric varifocal MEMS micromirror capable of both quasistatic and resonant actuation, achieving a total optical power of +/- 100 m-1 at 90 kHz. A novel figure of merit is introduced, demonstrating that this device outperforms existing varifocal mirrors by a factor of 1.5, making it the highest reported to date. The mirror

Author

Pirlo Ac

Language

EN