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Atomistic simulation of the FEBID-driven growth of iron-based nanostructures by Prosvetov, Alexey; Verkhovtsev, Alexey V.; Sushko, Gennady; Solov'yov, Andrey V. is a scholarly article available to read on EtoBox.

What is Atomistic simulation of the FEBID-driven growth of iron-based nanostructures about?

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical characteristics (lateral size, height and volume), morphology and metal content of the grown nanostructures are analyzed at different irradiation and precursor replenishment conditions corresponding to the electron-limited and precursor-limited regimes (ELR & PLR) of FEBID. A significant variation of the deposit's morphology and elemental composition is observed with increasing the electron current from 1 to 4 nA. At low beam current (1 nA) corresponding to the ELR and a low degree of Fe(CO)$_5$ fragmentation, the nanogranular structures are formed which consist of isolated iron clusters embedded into an organic matrix. In this regime, metal clusters do not coalesce with increasing electron fluence, resulting in relatively low metal content of the nanostructures. A higher beam current of 4 nA corresponding to the PLR facilitates the precursor fragmentation and the coalescence of metal clusters into a dendrite-like structure with the size corresponding t

Author

Prosvetov, Alexey; Verkhovtsev, Alexey V.; Sushko, Gennady; Solov'yov, Andrey V.

Published

2021

Language

EN