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Evaluation of the N- and La-induced defects in the high-κ gate stack using low frequency noise characterization by C.D. Young; D. Veksler; S. Rumyantsev; J. Huang; H. Park; W. Taylor; M. Shur; G. Bersuker is a Engineering article available to read on EtoBox.

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Author
C.D. Young; D. Veksler; S. Rumyantsev; J. Huang; H. Park; W. Taylor; M. Shur; G. Bersuker
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
Published
2011
Language
EN
Field
Engineering (Physical Sciences)

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