Opening book details…
About this Engineering article
Effects of Ion Metal Plasma (IMP) Titanium Deposition on Ti Silicide Formation by Sabbadini, A.; Cazzaniga, F.; Brambilla, M.; Bresolin, C.; Cusi, V.; Marangon, T.; Queirolo, G. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Sabbadini, A.; Cazzaniga, F.; Brambilla, M.; Bresolin, C.; Cusi, V.; Marangon, T.; Queirolo, G.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)