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Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma by Maoyang Li; Tianyuan Huang; Peiyu Ji; Haiyun Tan; Lanjian Zhuge; Xuemei Wu is a Engineering article available to read on EtoBox.

What is Influence of Nitrogen Seeding on the Electron and Ion Behaviors in Helicon Wave Excited Argon Plasma about?

The effect of nitrogen gas seeding on electron density, electron energy probability functions (EEPFs), ion energy distribution functions (IEDFs) and ion species concentrations downstream of an argon helicon wave plasma (HWP) beam is investigated by Langmuir probe, electrostatic quadrupole plasma analyser and optical emission spectroscopy. Neutral depletion is found at axial location Z = 45 cm downstream of the HWP source, which can suppress the electron loss and cooling at the axis caused by N 2 seeding. As the axial location increases to Z = 57.5 cm and then to 70 cm, neutral depletion becomes slight and the addition of N 2 can effectively modulate the electron density and EEPFs. IEDFs results indicate a decrease of the average ion energy with an increase of nitrogen admixture, which is consistent with the sheath voltage fall estimated based on the electron temperature and the proportion of each ion species. Moreover, compared with Ar + ions, the IEDFs of N 2 + and N + ions present a shift towards the higher energy region, due to the radio frequency oscillating sheath effects

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Author

Maoyang Li; Tianyuan Huang; Peiyu Ji; Haiyun Tan; Lanjian Zhuge; Xuemei Wu

Publisher

Springer Science and Business Media LLC

Published

2023

Language

EN

Field

Engineering (Physical Sciences)