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Spectroscopic Ellipsometry of Multilayer Dielectric Coatings by D. Bhattacharyya; N.K. Sahoo; S. Thakur; N.C. Das is a Engineering article available to read on EtoBox.

What is Spectroscopic Ellipsometry of Multilayer Dielectric Coatings about?

Multilayer dielectric coatings deposited by e-beam evaporation have been characterised by the phase modulated spectroscopic ellipsometer (PMSE). Measurements have been done on various multilayer thin "lms devices e.g., high re#ectivity mirror, narrow band "lter, beam combiner, beam splitter, etc. consisting of several bilayers of TiO /SiO . Results have been shown here for the "rst two samples. The measured Ellipsometry spectra are "tted with theoretical spectra generated assuming appropriate models regarding the sample structures. Optical constants of the substrates and the SiO "lms have been supplied and trial dispersion relations have been used for the optical constants of the TiO layers. The "ttings have been done by minimising the squared di!erence ( ) between the measured and calculated values of the ellipsometric parameters ( and ) and accurate information have been derived regarding the thickness and refractive indices of the di!erent layers.

Who reads Spectroscopic Ellipsometry of Multilayer Dielectric Coatings?

Author

D. Bhattacharyya; N.K. Sahoo; S. Thakur; N.C. Das

Publisher

Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)

Published

2001

Language

EN

Field

Engineering (Physical Sciences)