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About this Engineering article
SILICON DEPOSITION FROM DISILANE : EXPERIMENTAL STUDY AND MODELLING by GUEYE, M.; SCHEID, E.; TAURINES, P.; DUVERNEUIL, P.; BIELLE-DASPET, D.; COUDERC, J. P. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- GUEYE, M.; SCHEID, E.; TAURINES, P.; DUVERNEUIL, P.; BIELLE-DASPET, D.; COUDERC, J. P.
- Publisher
- EDP Sciences; Les Editions de physique (ISSN 1155-4339)
- Published
- 1991
- Field
- Engineering (Physical Sciences)