About this scholarly article

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Fast Dry Fabrication Process with Ultra-Thin Atomic Layer Deposited Mask for Released MEMS-Devices with High Electromechanical Coupling by Koskenvuori, M.; Chekurov, N.; Airaksinen, V-M.; Tittonen, I. is a scholarly article available to read on EtoBox.

Author

Koskenvuori, M.; Chekurov, N.; Airaksinen, V-M.; Tittonen, I.

Publisher

IEEE

Published

2007