About this scholarly article

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. - A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner by Choo, H.; Garmire, D.; Demmel, J.; Muller, R.S. is a scholarly article available to read on EtoBox.

Author

Choo, H.; Garmire, D.; Demmel, J.; Muller, R.S.

Publisher

IEEE

Published

2005

Language

EN