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Can I read Surface deformation phenomena induced by electron-beam irradiation in strained InGaAs/AlGaAs layers on GaAs (1 0 0) and (3 1 1)B substrates on EtoBox?
Surface deformation phenomena induced by electron-beam irradiation in strained InGaAs/AlGaAs layers on GaAs (1 0 0) and (3 1 1)B substrates by T Ogawa; M Akabori; J Motohisa; T Fukui is a Physics and Astronomy article available to read on EtoBox.
What is Surface deformation phenomena induced by electron-beam irradiation in strained InGaAs/AlGaAs layers on GaAs (1 0 0) and (3 1 1)B substrates about?
The strained InGaAs/AlGaAs layer structures have been grown on GaAs ( 10 0) and (3 1 1)B substrates in a horizontal low-pressure metalorganic vapor-phase epitaxy system at a temperature of 8003C. In the surface observation using a high-resolution scanning electron microscope, we have found that surface deformation phenomena induced by electron-beam irradiation in strained In Ga As,/Al Ga As layers on GaAs (1 0 0) and (3 1 1)B substrates. The change of the surface morphology was observed in real time on the display of SEM with the accelerating voltage of 30 kV and the irradiated time of 60}120 s. The surface deformation through mass transport seems to be the cause of the residual strain relaxation due to electron-beam irradiation.
Who reads Surface deformation phenomena induced by electron-beam irradiation in strained InGaAs/AlGaAs layers on GaAs (1 0 0) and (3 1 1)B substrates?
It is typically read by researchers, students, and practitioners in Physics and Astronomy.
- Author
- T Ogawa; M Akabori; J Motohisa; T Fukui
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0921-4526)
- Published
- 1999
- Language
- EN
- Field
- Physics and Astronomy (Physical Sciences)