About this scholarly article

2005 13th International Conference on Advanced Thermal Processing of Semiconductors - Superior Spike Annealing Performance in 65nm Source/Drain Extension Engineering by Li, C.I.; Chin Cheng Chien, ; Huang, K.T.; Po Yuan Chen, ; Hsiang Ying Wang, ; Tzou, S.F.; Chen, S.; Lin, J.; Fu, T.; Tandjaja, R.; Ramamurthy, S.; Chung, E.; Chuang, J.; Wen-Shan Chen, is a scholarly article available to read on EtoBox.

Author

Li, C.I.; Chin Cheng Chien, ; Huang, K.T.; Po Yuan Chen, ; Hsiang Ying Wang, ; Tzou, S.F.; Chen, S.; Lin, J.; Fu, T.; Tandjaja, R.; Ramamurthy, S.; Chung, E.; Chuang, J.; Wen-Shan Chen,

Publisher

IEEE

Published

2005

Language

EN