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About this Engineering article
Surface Smoothing Mechanism of Gas Cluster Ion Beams by Noriaki Toyoda; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Noriaki Toyoda; Norihisa Hagiwara; Jiro Matsuo; Isao Yamada
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 2000
- Language
- EN
- Field
- Engineering (Physical Sciences)
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