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Design and characterization of MIKES metrological atomic force microscope by V. Korpelainen; J. Seppä; A. Lassila is a Engineering article available to read on EtoBox.
What is Design and characterization of MIKES metrological atomic force microscope about?
An interferometrically traceable metrological atomic force microscope (IT-MAFM) has been developed at MIKES. It can be used for traceable atomic force microscope (AFM) measurements and for calibration of transfer standards of scanning probe microscopes (SPMs). Sample position is measured online by 3 axes of laser interferometers. A novel and simple method for detection and online correction of the interferometer nonlinearity was developed. Effect of the nonlinearity in measurements is demonstrated. In the design, special attention has been paid to elimination of external disturbances like electric noise, acoustic noise, ambient temperature variations and vibrations. The instrument has been carefully characterized. The largest uncertainty components are caused by Abbe errors, orthogonality errors, drifts and noise. Noise level in Z direction was 0.25 nm, and in X and Y directions 0.36 nm and 0.31 nm, respectively. Standard uncertainties for X, Y and Z coordinates are u cx = q[0.48; 0.04x; 0.17y; 1.7z; 2 time] nm, u cy = q[0.45; 0.31x; 0.07y; 0.14z; 4 time] nm and u cz = q[0.42; 3x; 7.2y; 0.18z; 2 time] nm where x, y, z are in m and time in h. Standard uncertainty for 300 nm pitch is
Who reads Design and characterization of MIKES metrological atomic force microscope?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- V. Korpelainen; J. Seppä; A. Lassila
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0141-6359)
- Published
- 2010
- Language
- EN
- Field
- Engineering (Physical Sciences)