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About this Engineering article
The Structure, Morphology and Resistivity of in Situ Phosphorus Doped Polysilicon Films by V.P Lesnikova; A.S Turtsevich; V.Y Krasnitsky; V.A Emelyanov; O.Y Nalivaiko; S.V Kravtsov; T.V Makarevich is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- V.P Lesnikova; A.S Turtsevich; V.Y Krasnitsky; V.A Emelyanov; O.Y Nalivaiko; S.V Kravtsov; T.V Makarevich
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1994
- Field
- Engineering (Physical Sciences)