About this Engineering article
Kollektorbeschichtungen für die EUV‐Lithografie by Marco Perske; Hagen Pauer; Sergiy Yulin; Marcus Trost; Sven Schröder; Angela Duparré; Torsten Feigl; Norbert Kaiser is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Marco Perske; Hagen Pauer; Sergiy Yulin; Marcus Trost; Sven Schröder; Angela Duparré; Torsten Feigl; Norbert Kaiser
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Ltd.; Wiley (ISSN 0947-076X)
- Published
- 2010
- Field
- Engineering (Physical Sciences)