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Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (Oxford Series in Nanomanufacturing) by Ivo Utke, Stanislav Moshkalev, Phillip Russell is a nonfiction available to read on EtoBox.

What is Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (Oxford Series in Nanomanufacturing) about?

Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing the historical evolution of FIB and FEB systems, applied first for micro- and more recently for nanofabrication and prototyping, practical solutions available in the market for different applications, and current trends in development of tools and their integration in a fast growing field of nanofabrication and nanocharacterization. Limitations of the FIB/FEB techniques, especially important when nanoscale resolution is considered, as well as possible ways to overcome the experimental difficulties in creating new nanodevices and improving resolution of processing, are outlined. Chapters include tutorials describing fundamental aspects of the interaction of beams (FIB/FEB) with surfaces, nanostructures and adsorbed molecules; electron and ion beam chemistries; basic theory, design and configuration of equipment; simulations of processes; basic solutions for nanoprototyping. Emerging techn

Who reads Nanofabrication Using Focused Ion and Electron Beams: Principles and Applications (Oxford Series in Nanomanufacturing)?

Author

Ivo Utke, Stanislav Moshkalev, Phillip Russell

Publisher

IRL Press at Oxford University Press

Published

2012

Language

EN

ISBN

9780199920990

Category

nonfiction

Subjects

Science, Technology, Engineering