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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California (Saturday 22 January 2011)] MOEMS and Miniaturized Systems X - Fabrication and testing of MEMS-based optical filter combined with a HgCdTe detector by Kozak, Dmitry A.; Schenk, Harald; Piyawattanametha, Wibool; Fernandez, Bautista; Morley, Michael L.; Velicu, Silviu; Kubby, Joel is a scholarly article available to read on EtoBox.

Author
Kozak, Dmitry A.; Schenk, Harald; Piyawattanametha, Wibool; Fernandez, Bautista; Morley, Michael L.; Velicu, Silviu; Kubby, Joel
Publisher
SPIE
Published
2011
Language
EN

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