About this document
NSR-SF155 Leaflet (PDF - 383KB) - Nikon - Kopie by habibi123456789bibi is a document available to read on EtoBox.
The NSR-SF155 i-line scan field stepper is designed for mass production of next-generation memory and microprocessors, achieving a throughput of over 200 wafers per hour. It features Skyhook Technology for reduced vibration, improved wafer stage speed, and enhanced chamber temperature stability, maintaining an overlay accuracy of 25 nm or better. The system offers a low total cost of ownership and allows customers to upgrade from the NSR-SF150.
- Author
- habibi123456789bibi
- Language
- EN