Opening book details…
About this Engineering article
Behavior of volatile dopants (P, Sb) in Czochralski silicon growth by Porrini, M.; Scala, R.; Voronkov, V.V. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Porrini, M.; Scala, R.; Voronkov, V.V.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0022-0248)
- Published
- 2017
- Language
- EN
- Field
- Engineering (Physical Sciences)