About this scholarly article

Proceedings of 11th International Conference on Ion Implantation Technology - UV curing and photoresist outgassing in high energy implantation by Jones, M.A.; Erokhin, Y.; Horsky, T.; Insalaco, L.; Whiteside, D.; Slater, S.; Buffat, S.; Kickel, B.; Parrill, T.; Jie Jie Xu, is a scholarly article available to read on EtoBox.

Author

Jones, M.A.; Erokhin, Y.; Horsky, T.; Insalaco, L.; Whiteside, D.; Slater, S.; Buffat, S.; Kickel, B.; Parrill, T.; Jie Jie Xu,

Publisher

IEEE

Published

1997

Language

EN