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Can I read Simulation of Plasma-based Ion Implantation of a Sawtooth Target on EtoBox?
Simulation of Plasma-based Ion Implantation of a Sawtooth Target by T.E. Sheridan is a Engineering article available to read on EtoBox.
What is Simulation of Plasma-based Ion Implantation of a Sawtooth Target about?
PIasma-based ion implantation of a two-dimensional target consisting of a periodic array of symmetric, 90 °, triangular sawteeth is studied using a particle-in-cell plasma simulation. The average ion flux, ion impact angle, ion impact energy and the energyresolved dose are computed. When the sheath width is large compared to the tooth size, the sheath edge becomes planar, the ion flux is nearly uniform and ions impact the surface of the target at ~45 °. The incident dose is greatest near the convex corner, and least in the concave comer.
Who reads Simulation of Plasma-based Ion Implantation of a Sawtooth Target?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- T.E. Sheridan
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
- Published
- 1997
- Language
- EN
- Field
- Engineering (Physical Sciences)