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What is TiCN Coating: Friction & Wear Analysis about?

This study investigates the influence of substrate bias on the structure and properties of TiCN thin films deposited by radio-frequency magnetron sputtering. The results show that increasing the negative bias voltage enhances the hardness and wear resistance of the films, with optimal properties observed at -70 V. Additionally, the deposition rate, surface roughness, and corrosion resistance are significantly affected by the substrate bias, indicating the importance of this parameter in the coating process.

Author

Anggie

Language

EN